 |
|
|
|
SUBSTRATE CHARCTERISTICS |
 Plate
Dimension |
|
Dimension Code
|
Standard Dimension
|
Size
|
Thickness
|
|
mm
|
inch
|
mm
|
inch
|
|
min
|
max
|
min
|
max
|
min
|
max
|
min
|
max
|
|
5009
|
5.0×5.0×0.09
|
126.24
|
127.00
|
4.970
|
5.000
|
2.20
|
2.40
|
0.086
|
0.094
|
|
6009
|
6.0×6.0×0.09
|
151.64
|
152.40
|
5.970
|
6.000
|
2.20
|
2.40
|
0.086
|
0.094
|
|
6012
|
6.0×6.0×0.12
|
151.64
|
152.40
|
5.970
|
6.000
|
2.95
|
3.15
|
0.116
|
0.124
|
|
6025
|
6.0×6.0×0.25
|
151.64
|
152.40
|
5.970
|
6.000
|
6.25
|
6.45
|
0.246
|
0.254
|
|
7012
|
7.0×7.0×0.12
|
177.04
|
177.80
|
6.970
|
7.000
|
2.95
|
3.15
|
0.116
|
0.124
|
|
| |
| Squareness
of Substrates： |
| Better than 0.015"/1" |
| Edges
of Substrates |
| Ground and chamfered 45°on all
substrates |
| Parallelism
of Substrates |
 |
|
 |
|
| Flatness
Availability of Substrates |
|
Dimension Code
|
Flatness
|
|
Quartz Glass
|
Soda Lime Glass
|
|
0.25μm
|
0.5μm
|
1μm
|
2μm
|
5μm
|
2μm
|
3μm
|
5μm
|
6μm
|
15μm
|
|
5009
|
|
|
|
|
|
●
|
●
|
●
|
|
|
|
6009
|
|
|
|
●
|
●
|
|
●
|
|
●
|
|
|
6012
|
●
|
|
|
●
|
●
|
|
●
|
|
●
|
|
|
6025
|
●
|
●
|
●
|
●
|
●
|
|
|
|
|
|
|
7012
|
●
|
●
|
●
|
●
|
●
|
|
●
|
|
●
|
|
|
| Spectral
Transmission Curve |
 |
|
|
SUBSTRATE COMPOSITIONS |
|
Substrate Type
|
|
|
|
|
|
RO
|
coefficient of expansion
|
|
Quartz Glass
|
100
|
|
|
|
|
|
|
|
Low Expansion Glass
|
60
|
15
|
5
|
1
|
1
|
18
|
|
|
Soda Lime Glass
|
73
|
1
|
|
15
|
1
|
10
|
|
|
|
|
CHROME METALLIZATION |
| Properties
of Standard Anti-Reflective Chrome FilmType("ARC") |
|
Item
|
Condition
|
Standard Value
|
|
Film Thickness
|
|
100±8 nm
|
|
Optical Density
|
450nm
|
3.0±0.2
|
|
Reflectivity
|
436nm
|
10±2%
|
|
Sheet Resistance
|
four-point probe
|
＜26Ω/ sq
|
|
Wet Etching Time
|
Manual
|
50±3 sec
|
|
Undercut Rate ( both sides )
|
APT
|
＜0.07μm／10 s
|
|
Chemical Resistance
|
|
＞120min
|
|
|
＞120min
|
|
| Pinhole
Specification |
|
Type
|
Pinhole Size
|
Unit
|
Pinhole pcs
|
|
Standard Type
|
1μm - 4μm
|
pcs / cm2
|
< 0.05
|
|
Low Density Type
|
≥ 1.5 μm
|
pcs / cm2
|
None
|
|
Zero Defect Type
|
≥ 1.0 μm
|
pcs / cm2
|
None
|
|
| Spectral
Reflectance |
 |
| |
| RESIST
COATING |
| Standard
Resists |
|
Type
|
Resist
|
Thickness
|
|
Nominal
|
Uniformity
|
|
Positive Photo
|
AZ P1350
|
500 nm±5%
|
< 20nm
|
|
AZ 1500
|
500 nm±5%
|
< 20nm
|
|
S 1805
|
500 nm±5%
|
< 20nm
|
|
I P 3600
|
450 nm±5%
|
< 20nm
|
|
Positive E-Beam
|
P B S
|
250/400 nm±3%
|
< 10nm
|
|
EBR-9
|
550 nm±5%
|
< 20nm
|
|
PMMA AR-P669
|
550 nm±5%
|
< 20nm
|
|
PMMA Copolymer AR-P610
|
550 nm±5%
|
< 20nm
|
|
| Defect
Density |
|
Size Code
|
Square Quality Area
|
Defect Density
|
|
5009
|
107×107
|
0 ＞ 0.3μm
0 ＞ 0.5μm
0 ＞ 0.8μm
0 ＞ 1μm
0 ＞ 2μm
|
|
6009
6012
6025
|
127×127
132×132
|
|
7012
|
157×157
|
|
| |
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Lufeng Rd., 
+86-731-8998268
