Mask Blank
    Large Size Mask Blank
    Small Size Mask Blank
   Filming&Coating
Address:40# Lufeng Rd.,
  National High-Tech Industrial
  Development Zone,
  Changsha, Hunan, China
Tel:+86-731-8998246
  +86-731-8998268
Fax:+86-731-8998249
Postcode:410205
Email:sales@oim.com.cn

 

GLASS SUBSTRATE TYPE
  Soda Lime Glass:202.8×202.8 mm ~ 550×650 mm ,Square Quality Area .
GLASS SUBSTRATE CHARCTERISTICS
Defect Type
Size
Quantity
Bubble
A:>20μm
B:>50μm
0
0
A:≤20μm
B:≤50μm
≤8pcs
≤8pcs
Pit
A:≥20μm
B:≥50μm
0
0
Inclusion
≥ 30μm
0
Glass chip
≥ 2 mm
0
FLATNESS AVAILABILITY
Grade
Flatness
A
≤ 20 μm
B
≤ 50 μm
C
≤ 70 μm
PINHOLE DENSITY
Grade
Pinhole Size
Density
A
5 ~ 10 μm
≤0.01 pcs/
10 μm over
None
B
10 ~ 30 μm
≤0.01 pcs/
30 μm over
None
C
50 μm over
None
RESISTS COATING
Type
Resist
Thickness
Nominal
Uniformity
Positive Photo
AZ 1500
1000 nm±5%
± 10 %
AZ TFP 650
1000 nm±5%
± 10 %
 
Copyright © 2005 - 2008 OIM.com.cn, All Rights Reserved Tel:86-731-8998233 (Web)   Admin