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GLASS
SUBSTRATE TYPE |
| Soda Lime Glass:202.8×202.8 mm ~
550×650 mm ,Square Quality Area . |
GLASS
SUBSTRATE CHARCTERISTICS |
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Defect Type
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Size
|
Quantity
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|
Bubble
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A:>20μm
B:>50μm
|
0
0
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A:≤20μm
B:≤50μm
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≤8pcs
≤8pcs
|
|
Pit
|
A:≥20μm
B:≥50μm
|
0
0
|
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Inclusion
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≥ 30μm
|
0
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Glass chip
|
≥ 2 mm
|
0
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FLATNESS AVAILABILITY |
|
Grade
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Flatness
|
|
A
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≤ 20 μm
|
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B
|
≤ 50 μm
|
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C
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≤ 70 μm
|
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PINHOLE
DENSITY |
|
Grade
|
Pinhole Size
|
Density
|
|
A
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5 ~ 10 μm
|
≤0.01 pcs/ 
|
|
10 μm over
|
None
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B
|
10 ~ 30 μm
|
≤0.01 pcs/ 
|
|
30 μm over
|
None
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C
|
50 μm over
|
None
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RESISTS
COATING |
|
Type
|
Resist
|
Thickness
|
|
Nominal
|
Uniformity
|
|
Positive Photo
|
AZ 1500
|
1000 nm±5%
|
± 10 %
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AZ TFP 650
|
1000 nm±5%
|
± 10 %
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